Van Zant, Peter <br/><br/>
Microchip fabrication / 
Peter van Zant 
 - 4 
 - New York :  McGraw-Hill,  2000       
 - 632 p. 
<br/><br/><label>ISBN: </label>0071356363 
<br/><br/><label>LC Class. No.: </label>TK 7871 V217m 2000